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1

Impact of Defects on the Technology of Highly Integrated Circuits

Kolbesen, Bernd O., Bergholz, Werner, Wendt, H.

Journal:

Materials Science Forum

Year:

1989

File:

PDF, 825 KB

1989

2

Application of UV/VIS-Spectroscopy for Determination of Complexing Agent Stability in APM and Like Mixtures Thereof

Doll, O., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 269 KB

english, 2005

3

A comparison of the etching behaviour of the FS Cr-free SOI with that of the Secco etching solution on silicon-on-insulator substrates

Jochen Mähliß, Alexandra Abbadie, Bernd O. Kolbesen

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 1.00 MB

english, 2009

4

Copper decoration and etching of crystal defects in SOI materials

Hanan Idrisi, Bernd O. Kolbesen

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 712 KB

english, 2009

5

A comparative study of the growth of octadecyltrichlorosilane and 3-mercaptopropyltrimethoxysilane self-assembled monolayers on hydrophilic silicon surfaces

Shang-Ray Yang, Bernd O. Kolbesen

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 2.98 MB

english, 2008

6

Defect delineation by chemical etching techniques in silicon and engineered silicon substrates: Novel chemistries and basic aspects

Bernd O. Kolbesen, Jochen Mähliß, Daniel Possner

Journal:

physica status solidi (a)

Year:

2011

Language:

english

File:

PDF, 224 KB

english, 2011

7

Annealing of evaporated and sputtered niobium films in oxygen and nitrogen rich atmospheres by Rapid Thermal Processing (RTP)

Volha A. Matylitskaya, Oliver Brunkahl, Gerald Kothleitner, Wolfgang Bock, Bernd O. Kolbesen

Journal:

physica status solidi (c)

Year:

2007

Language:

english

File:

PDF, 1.03 MB

english, 2007

8

Nitridation of Niobium Pentoxide Films in Ammonia by Rapid Thermal Processing

Volha A. Matylitskaya, Gerald Kothleitner, Wolfgang Bock, Bernd O. Kolbesen

Journal:

Zeitschrift für anorganische und allgemeine Chemie

Year:

2009

Language:

english

File:

PDF, 1.08 MB

english, 2009

9

Removing coordinated metal ions from proteins: a fast and mild method in aqueous solution

Charlotte Carrer, Michael Stolz, Erwin Lewitzki, Claudia Rittmeyer, Bernd O. Kolbesen, Ernst Grell

Journal:

Analytical and Bioanalytical Chemistry

Year:

2006

Language:

english

File:

PDF, 131 KB

english, 2006

10

Nitridation of niobium films by rapid thermal processing: different behaviour of films on oxydized silicon and monocrystalline sapphire substrates

Oliver Brunkahl, Regine Mertens, Wolfgang Bock, Klaus Thoma, Bernd Ottmar Kolbesen

Journal:

Microchimica Acta

Year:

2006

Language:

english

File:

PDF, 809 KB

english, 2006

11

Oxidation and nitridation of niobium films by rapid thermal processing

Volha A. Matylitskaya, Wolfgang Bock, Klaus Thoma, Bernd O. Kolbesen

Journal:

Microchimica Acta

Year:

2006

Language:

english

File:

PDF, 279 KB

english, 2006

12

Asp-193 and Glu-218 of subunit II are involved in the Mn2+-binding of Paracoccus denitrificans cytochrome c oxidase

Heike Witt, Axel Wittershagen, Eckhard Bill, B.O Kolbesen, Bernd Ludwig

Journal:

Year:

1997

Language:

english

File:

PDF, 355 KB

english, 1997

13

Mutations in the Ca2+ binding site of the Paracoccus denitrificans cytochrome c oxidase

Ute Pfitzner, Anna Kirichenko, Alexander A. Konstantinov, Martina Mertens, Axel Wittershagen, Bernd O. Kolbesen, Guy C.M. Steffens, Axel Harrenga, Hartmut Michel, Bernd Ludwig

Journal:

Year:

1999

Language:

english

File:

PDF, 179 KB

english, 1999

14

Biphenylene Ring Expansion by a (H 3 C) 2 Si Link from Silicone Grease As Proven by the Crystal Structures of [(Sodium + [2.2.1]cryptand)(9,9-dimethylsilafluorene •- )] as Well as [Sodium + (triglyme) 2 (biphenylene •- )] and by Total-Reflection X-ray Fluorescence Spectrometry (TXRF) 1

Bock, Hans, Sievert, Mark, Bogdan, Camelia L., Kolbesen, Bernd O., Wittershagen, Axel

Journal:

Organometallics

Year:

1999

Language:

english

File:

PDF, 69 KB

english, 1999

15

Transformation of the Cu A Redox Site in Cytochrome c Oxidase into a Mononuclear Copper Center †

Zickermann, Volker, Wittershagen, Axel, Kolbesen, Bernd O., Ludwig, Bernd

Journal:

Year:

1997

Language:

english

File:

PDF, 141 KB

english, 1997

16

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Preparation and Characterisation of Self-Assembled Monolayers on Germanium Surfaces

Lommel, Martin, Mankel, Eric, Kolbesen, Bernd

Year:

2008

Language:

english

File:

PDF, 2.72 MB

english, 2008

17

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Delineation of Crystalline Defects in Semiconductor Substrates and Thin Films by Chemical Etching Techniques

Kolbesen, Bernd, Possner, Daniel, Maehliss, Jochen

Year:

2007

Language:

english

File:

PDF, 1.82 MB

english, 2007

18

Formation of Time-Dependent Haze on Silicon Wafers

Münter, N., Kolbesen, Bernd O., Storm, W., Müller, Timo

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 345 KB

2003

19

[ECS Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) - Munich, Germany (September 13 - September 14, 2007)] ECS Transactions - Organic Peracid Etches: A New Class of Chromium Free Etch Solutions for the Delineation of Defects in Different Semiconducting Materials

Possner, Daniel, Kolbesen, Bernd O., Cerva, Hans, Kluppel, V

Year:

2007

Language:

english

File:

PDF, 1.08 MB

english, 2007

20

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates

Maehliss, Jochen, Abbadie, Alexandra, Brunier, Francois, Kolbesen, Bernd O.

Year:

2008

Language:

english

File:

PDF, 696 KB

english, 2008

21

Preparation and Characterization of Self-Assembled Monolayers on Germanium Surfaces

Lommel, Martin, Hönicke, Philipp, Kolbe, Michael, Müller, Matthias, Reinhardt, Falk, Möbus, Pit, Mankel, Eric, Beckhoff, Burkhard, Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 1.35 MB

english, 2009

22

Single Step Alkaline Cleaning Solution for Advanced Semiconductor Cleaning

Baeyens, M., Hub, W., Kolbesen, Bernd O., Martin, A.R., Mertens, Paul W.

Journal:

Solid State Phenomena

Year:

1999

File:

PDF, 335 KB

1999

23

Metal Enhanced Oxidation of Silicon

Börner, M., Junghans, N., Landau, S., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

1999

File:

PDF, 284 KB

1999

24

Preparation and Characterization of Time Dependent Haze on Silicon Surfaces

Münter, N., Kolbesen, Bernd O., Storm, W., Müller, Timo

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 398 KB

2001

25

Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics

Guder, Mathias, Kolbesen, Bernd O., Delattre, Cécile, Fischer, C., Schier, H., Wagner, Gerald

Journal:

Solid State Phenomena

Year:

2008

Language:

english

File:

PDF, 262 KB

english, 2008

26

Application of HPLC for the Analysis of Organic Additives in Cleaning Chemicals and Cleaning Mixtures

Metzger, S., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2005

Language:

english

File:

PDF, 203 KB

english, 2005

27

Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning

Vos, Rita, Lux, Marcel, Arnauts, Sophia, Kenis, Karine, Maes, M., Onsia, Bart, Snow, James, Holsteyns, Frank, Vereecke, Guy, Mertens, Paul W., Heyns, Marc M., Doll, O., Fester, A., Kolbesen, Bernd O.,

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 443 KB

2003

28

Single Chemistry Cleaning with Complexing Agents (CAs): Determination of CA-Lifetimes by UV/VIS-Spectroscopy

Doll, O., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 350 KB

2003

29

Barium, Strontium and Bismuth Contamination in CMOS Processes

Boubekeur, H., Mikolajick, T., Höpfner, J., Dehm, C., Pamler, W., Steiner, J., Kilian, G., Kolbesen, Bernd O., Bauer, Anton J., Frey, Lothar, Ryssel, Heiner

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 478 KB

2001

30

Single Chemistry Cleaning Solution for Advanced Wafer Cleaning

Vos, Rita, Doll, O., Fester, A., Kolbesen, Bernd O., Lux, Marcel, Kenis, Karine, Onsia, Bart, Degendt, S., Schellkes, E., Hatcher, Z., Mertens, Paul W., Heyns, Marc M.

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 302 KB

2001

31

Process-Induced Defects in Silicon Technology

Kolbesen, Bernd O., Dellith, M., Booker, R., Cerva, Hans, Gelsdorf, F., Bergholz, Werner

Journal:

Solid State Phenomena

Year:

1993

Language:

english

File:

PDF, 990 KB

english, 1993

32

Defects and Contamination in Microelectronic Device Production: State-of-the-Art and Prospects

Kolbesen, Bernd O., Cerva, Hans, Zoth, G.

Journal:

Solid State Phenomena

Year:

2001

File:

PDF, 555 KB

2001

33

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - O

Guder, Mathias, Berger, Matthias, Dalmer, Michael, Kolbesen, Bernd

Year:

2009

Language:

english

File:

PDF, 1002 KB

english, 2009

34

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Copper Decoration Combined with Preferential Etching for Delineation of Crystal Defects in SOI and sSOI Materials

Idrisi, Hanan, Pejic, Marijana, Uzelli, Fatma, Kolbesen, Bernd

Year:

2009

Language:

english

File:

PDF, 809 KB

english, 2009

35

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Etch Features Revealed on Si(100) by Wet Chemical Etching with Solutions Containing Potassium Ions

Mähliss, Jochen, Höynck, Heide, Abbadie, Alexandra, Brunier, Francois, Merz, Rolf, Brodyanski, Alexander, Kolbesen, Bernd

Year:

2009

Language:

english

File:

PDF, 971 KB

english, 2009

36

[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Characterisation of Self-Assembled Monolayers on Germanium Surfaces via NEXAFS

Lommel, Martin, Reinhardt, Falk, Kolbe, Michael, Beckhoff, Burkhard, Müller, Matthias, Hönicke, Philipp, Kolbesen, Bernd

Year:

2009

Language:

english

File:

PDF, 803 KB

english, 2009

37

Delineation of Microdefects in Silicon Substrates by Chromium-Free Preferential Etching Solutions and Laser Scattering Tomography

Pellowska, M., Possner, D., Kot, D., Kissinger, G., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 633 KB

english, 2009

38

Ozone Chemistry for BEOL Resist Stripping – A Systematic Analytical Attempt to Understand the Interaction of O3 with Modern DUV-Resists

Guder, Mathias, Pellowska, Maren, Pohland, Maximilian, Dalmer, Michael, Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2009

Language:

english

File:

PDF, 527 KB

english, 2009

39

Complexing Agents Employed in Single Chemistry Cleaning: Stability Studies Using HPLC

Metzger, S., Kolbesen, Bernd O.

Journal:

Solid State Phenomena

Year:

2003

File:

PDF, 318 KB

2003

40

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Delineation of Crystalline Defects by Preferential Etching: Still more Alchemy than Science?

Kolbesen, Bernd O. O.

Year:

2006

Language:

english

File:

PDF, 100 KB

english, 2006

41

[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - A Chromium-free Defect Etching Solution for Application on SOI

Maehliss, Jochen, Abbadie, Alexandra, Kolbesen, Bernd O.

Year:

2007

Language:

english

File:

PDF, 273 KB

english, 2007

42

Age-Related Cellular Copper Dynamics in the Fungal Ageing Model Podospora anserina and in Ageing Human Fibroblasts

Scheckhuber, Christian Q., Grief, Jürgen, Boilan, Emmanuelle, Luce, Karin, Debacq-Chainiaux, Florence, Rittmeyer, Claudia, Gredilla, Ricardo, Kolbesen, Bernd O., Toussaint, Olivier, Osiewacz, Heinz D.

Journal:

Year:

2009

Language:

english

File:

PDF, 1.54 MB

english, 2009

43

SEM, EPMA and TXRF characterization of electrochemically modified electrode surfaces

Alov, Nikolai, Ceglarek, Doris, Wittershagen, Axel, Kolbesen, Bernd O.

Journal:

Microscopy and Microanalysis

Year:

2003

Language:

english

File:

PDF, 344 KB

english, 2003

44

SEM, EPMA and TXRF characterization of electrochemically modified electrode surfaces

Alov, Nikolai, Ceglarek, Doris, Wittershagen, Axel, Kolbesen, Bernd O.

Journal:

Microscopy and Microanalysis

Year:

2003

File:

PDF, 344 KB

2003